SEMI Semiconductor Tubing
Ultra-high purity stainless steel tubing manufactured to SEMI standards for delivering ultra-pure gases and chemicals in semiconductor manufacturing facilities.
Specified to keep process gas uncontaminated
SEMI tubing is designed specifically to prevent contamination of process gases used in etching, lithography and other critical semiconductor processes. The relevant standards define both the wetted surface condition and the metallurgical cleanliness of the material itself.
The primary grade is 316L to SEMI F20, with EN 1.4432 and EN 1.4435 available where higher molybdenum content is needed for superior corrosion resistance. Carbon is held at 0.03% maximum to prevent carbide precipitation, and sulphur between 0.005% and 0.017% for weldability.
SEMI F20 defines three purity grades: General Purpose for standard semiconductor utilities, High Purity for most gas and chemical distribution, and Ultra-High Purity for advanced chemical distribution systems.
Surface and material, both governed
Wetted surface control
SEMI F19 defines surface-finish criteria for 300-series tubing and fittings in wafer-fab process lines.
Material cleanliness
SEMI F20 sets metallurgical cleanliness and composition for UHP chemical distribution.
Surface verification
F60 XPS/ESCA, F72 AES and F73 SEM methods characterise and inspect the finished bore.
Graded purity
Three defined purity levels let the fab match tube to duty without over-specifying.
| Standard | Title | Purpose |
|---|---|---|
| SEMI F19 | Surface Condition of Wetted Surfaces | Surface-finish criteria for 300-series tubing and fittings in wafer-fab process lines |
| SEMI F20 | 316L Stainless Steel Specification | Metallurgical cleanliness and composition for UHP chemical distribution systems |
| SEMI F60 | XPS / ESCA Test Method | Surface characterisation testing for chromium to iron ratios |
| SEMI F72 | AES Test Method | Auger electron spectroscopy for surface analysis |
| SEMI F73 | SEM Test Method | Scanning electron microscopy for surface inspection |
Where SEMI tubing is used
What to send us for a firm quote
The more of this we have up front, the faster the quotation and the fewer clarifications later. Partial enquiries are welcome — we will tell you what else the specification needs.
Send an enquirySEMI Semiconductor Tubing — common questions
What do SEMI F19 and F20 cover?
F19 defines surface-finish criteria for wetted surfaces of 300-series tubing and fittings in wafer-fab process lines. F20 defines metallurgical cleanliness and composition for UHP chemical distribution.
Why is carbon limited to 0.03 per cent?
Low carbon prevents carbide precipitation, protecting corrosion resistance in the heat-affected zone after welding.
Which purity grades are available?
SEMI F20 defines General Purpose for standard utilities, High Purity for most gas and chemical distribution, and Ultra-High Purity for advanced chemical distribution.
Are higher-molybdenum alternatives available?
Yes. EN 1.4432 and EN 1.4435 offer higher molybdenum content for superior corrosion resistance where the duty requires it.
Enquire about SEMI Semiconductor Tubing
Send grade, OD, wall, length, standard and finish for a firm quotation.